GPU Acceleration Of Rigorous Lithography Simulations

GPU Acceleration Of Rigorous Lithography Simulations

Producing modern semiconductor devices is an immensely challenging process. Successful execution entails advanced process nodes, novel device architectures, new materials, and many fabrication steps. One especially challenging area is lithography, in which light is sent through a photomask, passes through a projection system of lenses and mirrors, and strikes the substrate to create the device structures. In the early days of chip production, th…