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Carrier Mapping in Sub-2nm Node NSFETs with SSRM (imec, KU Leuven)
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Carrier Mapping in Sub-2nm Node NSFETs with SSRM (imec, KU Leuven)
Researchers from imec and KU Leuven published “Carrier Mapping in Sub-2nm Node Nanosheet Transistors with Scanning Spreading Resistance Microscopy.” Abstract “As the semiconductor industry transitions to gate-all-around architectures such as Nanosheet-FETs (NSFETs) for the 2nm node and beyond, controlling parasitic resistance through precise junction engineering is fundamental. This requires characterization methods capable of mapping active car…
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