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Novel transparent ceramics extend life of semiconductor etching equipment

Summary by TechXplore
A research team has successfully developed a new composition and processing technology for transparent plasma-resistant high-entropy ceramics. This innovation is the first of its kind in the world and is designed to extend the lifespan of internal components in semiconductor etching equipment while reducing contamination particles during the semiconductor manufacturing process. The study is published in the Journal of Advanced Ceramics.

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Novel transparent ceramics extend life of semiconductor etching equipment

A research team has successfully developed a new composition and processing technology for transparent plasma-resistant high-entropy ceramics. This innovation is the first of its kind in the world and is designed to extend the lifespan of internal components in semiconductor etching equipment while reducing contamination particles during the semiconductor manufacturing process. The study is published in the Journal of Advanced Ceramics.

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NewswiseNewswise

Pioneering a New Direction for Semiconductor Etching Ceramics!

Dr. Ho Jin Ma's research team from the Nano Materials Research Division at the Korea Institute of Materials Science (KIMS), in collaboration with Professor Jeong-Woo Lee's research team from Pusan National University, has successfully developed a groundbreaking new composition and processing technology for transparent plasma-resistant high-entropy ceramics.

·Charlottesville, United States
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Newswise broke the news in Charlottesville, United States on Friday, February 14, 2025.
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