Built-in quantum sensor detects bending stress in microscopic devices

Built-in quantum sensor detects bending stress in microscopic devices

Microelectromechanical systems (MEMS) are tiny devices used in technologies such as microphones, accelerometers and biosensors. MEMS are highly useful but prone to physical stress that affects their performance, stability ...

Tohoku University Embeds Quantum Sensor In Microscopic Parts

Researchers at Tohoku University integrated a quantum sensor directly into micro-electromechanical systems, or MEMS, to detect bending stress.

Diamond quantum sensor tracks stress from inside a microscopic device

A quantum-sensing region built directly into a diamond cantilever tracked changing bending stress as the device vibrated, without a separately attached sensor.