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Axcelis Announces Financial Results for Fourth Quarter and Full Year 2025

Axcelis achieved record CS&I revenue with double-digit growth and over $100 million free cash flow in 2025, driven by operational discipline and aftermarket strength.

  • On Feb. 17, 2026, Axcelis Technologies, Inc. reported fourth‑quarter revenue of $238 million, with GAAP diluted EPS of $1.10 and non-GAAP diluted EPS of $1.49.
  • Axcelis achieved a record CS&I quarter, citing mixed demand in Power and Mature markets while Memory demand improved, according to management.
  • More than $100 million of free cash flow was reported, and Axcelis returned over $120 million in capital to shareholders during the year, according to CFO Jamie Coogan.
  • For the quarter ending March 31, 2026, Axcelis expects revenues of approximately $195 million, GAAP EPS of about $0.38, and non-GAAP EPS of about $0.71, hosting an investor webcast with replay available for 30 days.
  • Axcelis is pursuing a merger with Veeco to capitalize on AI and electrification trends, but the company warned of regulatory and integration risks.
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Axcelis Announces Financial Results for Fourth Quarter and Full Year 2025

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PR Newswire broke the news in United States on Tuesday, February 17, 2026.
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